Pneumatic Servo Bearing Actuator for Ultraprecise Positioning – Part 1: Principle and Basic Performance
نویسندگان
چکیده
Tomoko Hirayama, Takakazu Kitagawa, Masato Kadotani, Hiroki Danjyo, Takashi Matsuoka1, Katsumi Sasaki2 and Hiroshi Yabe3 Department of Mechanical Engineering, Doshisha University 1-3 Miyakodani, Tatara, Kyotanabe, Kyoto, Japan Pneumatic Servo Controls Ltd. 2266-22 Anagahora, Shimo-Shidami, Moriyama-ku, Nagoya, Aichi, Japan Department of Mechanical Engineering, Kyoto University (former affiliation) Yoshida-honmachi, Sakyo-ku, Kyoto, Japan
منابع مشابه
Pneumatic Servo Bearing Actuator for Ultraprecise Positioning – Part 2: a New Approach to Ultra-precision Motion Control
INTRODUCTION Externally pressurized gas-lubricated thrust bearings (aerostatic bearings) keep the bearing clearance constant under a constant supply pressure. We investigated how controlling the supply pressure with an electro-pneumatic servovalve can be used to dynamically adjust the bearing gap height. As a result of our investigation, we developed an electropneumatic servo-actuator “pneumati...
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تاریخ انتشار 2008